SEMI M67:2020
Current
Current
The latest, up-to-date edition.
Test Method for Determining Wafer Near-Edge Geometry from a Measured Thickness Data Array Using the ESFQR, ESFQD, and ESBIR Metrics
Available format(s)
Hardcopy
Language(s)
English
Published date
01-07-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.Wafer near-edge geometry can significantly affect the yield of semiconductor device processing.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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