SEMI M71 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2020
This Specification defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large-scale integrated circuit (LSI) devices.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.