SEMI M71 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2020
€125.00
Excluding VAT
This Specification defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large-scale integrated circuit (LSI) devices.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
THIS STANDARD IS ALSO REFERES TO: SEMI M35
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
Summarise
Access your standards online with a subscription
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.
Important note : Users cannot be edited or removed once added to your Multi user PDF.