SEMI M71 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Specification defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large-scale integrated circuit (LSI) devices.
| DocumentType |
Standard
|
| Pages |
0
|
| ProductNote |
THIS STANDARD IS ALSO REFERES TO: SEMI M35
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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