SEMI M71 : 2020
Current
Current
The latest, up-to-date edition.
Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2020
This Specification defines thin-layer silicon-on-insulator (SOI) wafer requirements for CMOS large-scale integrated circuit (LSI) devices.
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