SEMI M75 : 2016
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR POLISHED MONOCRYSTALLINE GALLIUM ANTIMONIDE WAFERS
Published date
12-01-2013
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Specifies standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2009)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI T5 : 2014 | SPECIFICATION FOR ALPHANUMERIC MARKING OF ROUND COMPOUND SEMICONDUCTOR WAFERS |
| SEMI MF671:2012 | TEST METHOD FOR MEASURING FLAT LENGTH ON WAFERS OF SILICON AND OTHER ELECTRONIC MATERIALS |
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