SEMI M81 : 2018
Current
Current
The latest, up-to-date edition.
GUIDE TO DEFECTS FOUND IN MONOCRYSTALLINE SILICON CARBIDE SUBSTRATES
Published date
12-01-2013
Displays, explains & gives reference for various characteristic features and defects that are seen on silicon carbide wafers. Recommended practices for observation are referenced as far as available standards.
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