SEMI M81 : 2018
Current
Current
The latest, up-to-date edition.
GUIDE TO DEFECTS FOUND IN MONOCRYSTALLINE SILICON CARBIDE SUBSTRATES
Published date
12-01-2013
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Displays, explains & gives reference for various characteristic features and defects that are seen on silicon carbide wafers. Recommended practices for observation are referenced as far as available standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI M55 : 2017 | SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON CARBIDE WAFERS |
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