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SEMI M82 : 2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR THE CARBON ACCEPTOR CONCENTRATION IN SEMI-INSULATING GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY

Superseded date

05-10-2020

Published date

12-01-2013

Describes a method for the measurement of the carbon acceptor concentration in semi-insulating (SI) gallium arsenide (GaAs) by infrared absorption.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (09/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI M64 : 2015 TEST METHOD FOR THE EL2 DEEP DONOR CONCENTRATION IN SEMI-INSULATING (SI) GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY
SEMI M54 : 2004(R2011) GUIDE FOR SEMI-INSULATING (SI) GAAS MATERIAL PARAMETERS

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