SEMI M82 : 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR THE CARBON ACCEPTOR CONCENTRATION IN SEMI-INSULATING GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY
Superseded date
05-10-2020
Superseded by
Published date
12-01-2013
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Describes a method for the measurement of the carbon acceptor concentration in semi-insulating (SI) gallium arsenide (GaAs) by infrared absorption.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (09/2012)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI M64 : 2015 | TEST METHOD FOR THE EL2 DEEP DONOR CONCENTRATION IN SEMI-INSULATING (SI) GALLIUM ARSENIDE SINGLE CRYSTALS BY INFRARED ABSORPTION SPECTROSCOPY |
| SEMI M54 : 2004(R2011) | GUIDE FOR SEMI-INSULATING (SI) GAAS MATERIAL PARAMETERS |
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