SEMI M82:2020
Current
Current
The latest, up-to-date edition.
Test Method for the Carbon Acceptor Concentration in Semi-Insulating Gallium Arsenide Single Crystals by Infrared Absorption Spectroscopy
Available format(s)
Hardcopy
Language(s)
English
Published date
01-08-2020
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the determination of the carbon content in GaAs using infrared (IR) absorption.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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