SEMI M83 : 2013
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR DETERMINATION OF DISLOCATION ETCH PIT DENSITY IN MONOCRYSTALS OF 3-5 COMPOUND SEMICONDUCTORS
05-10-2020
24-01-2013
Contains the determination of dislocation etch pit density on round test slices and commercial wafers of 3-5 compound semiconductors using optical microscopy for identification and registration of dislocation etch pits.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2013)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Superseded
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SupersededBy |
SEMI M55 : 2017 | SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON CARBIDE WAFERS |
SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
SEMI M40 : 2014 | GUIDE FOR MEASUREMENT OF ROUGHNESS OF PLANAR SURFACES ON POLISHED WAFERS |
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