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SEMI M83 : 2013

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR DETERMINATION OF DISLOCATION ETCH PIT DENSITY IN MONOCRYSTALS OF 3-5 COMPOUND SEMICONDUCTORS

Superseded date

05-10-2020

Superseded by

SEMI M83:2020

Published date

24-01-2013

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Contains the determination of dislocation etch pit density on round test slices and commercial wafers of 3-5 compound semiconductors using optical microscopy for identification and registration of dislocation etch pits.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI M55 : 2017 SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON CARBIDE WAFERS

SEMI M59 : 2014 TERMINOLOGY FOR SILICON TECHNOLOGY
SEMI M40 : 2014 GUIDE FOR MEASUREMENT OF ROUGHNESS OF PLANAR SURFACES ON POLISHED WAFERS

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