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SEMI M86:2022
Current
Current
The latest, up-to-date edition.
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Specification for Polished Monocrystalline c-Plane Gallium Nitride Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-09-2022
A complete purchase specification may require the defining of additional physical, electrical, and bulk properties.
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