SEMI M87 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TEST METHOD FOR CONTACTLESS RESISTIVITY MEASUREMENT OF SEMI-INSULATING SEMICONDUCTORS
Published date
08-03-2016
Superseded date
12-05-2022
Superseded by
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Defines methods for the contactless measurement of the resistivity of semi-insulating samples and wafers.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2016)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI M55 : 2017 | SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON CARBIDE WAFERS |
| SEMI M55 : 2017 | SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON CARBIDE WAFERS |
| SEMI M54 : 2004(R2011) | GUIDE FOR SEMI-INSULATING (SI) GAAS MATERIAL PARAMETERS |
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