SEMI M87:2022
Current
Current
The latest, up-to-date edition.
Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2022
The purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi-insulating samples and wafers.
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