SEMI M9.8 : 2006(R2012)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR ROUND 200 MM POLISHED MONOCRYSTALLINE GALLIUM ARSENIDE WAFERS (NOTCHED)
Published date
12-01-2013
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Describes properties of 200 mm mono-crystalline GaAs substrates. Also uniquely defines those mechanical parameters that do not need, for technical reasons, a choice of different values.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006) Not available separately, Published within the SEMI M9 family of standards. (09/2013)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI T5 : 2014 | SPECIFICATION FOR ALPHANUMERIC MARKING OF ROUND COMPOUND SEMICONDUCTOR WAFERS |
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