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SEMI M9.8 : 2006(R2012)

SEMI M9.8 : 2006(R2012)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR ROUND 200 MM POLISHED MONOCRYSTALLINE GALLIUM ARSENIDE WAFERS (NOTCHED)

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes properties of 200 mm mono-crystalline GaAs substrates. Also uniquely defines those mechanical parameters that do not need, for technical reasons, a choice of different values.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006) Not available separately, Published within the SEMI M9 family of standards. (09/2013)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI T5 : 2014 SPECIFICATION FOR ALPHANUMERIC MARKING OF ROUND COMPOUND SEMICONDUCTOR WAFERS

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