SEMI MF1049:2008(R2023)
Current
Current
The latest, up-to-date edition.
Practice for Shallow Etch Pit Detection on Silicon Wafers
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Practice covers detection of high densities of shallow etch pits on silicon wafers doped either p- or n-type and with resistivities as low as 0.005 Ω·cm.
| DocumentType |
Standard
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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