SEMI MF1366:2008(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry
Available format(s)
Hardcopy
Superseded date
16-11-2023
Language(s)
English
Published date
01-10-2018
This Test Method covers the determination of total oxygen concentration in the bulk of single crystal silicon substrates using SIMS.
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