SEMI MF1366:2008(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Test Method for Measuring Oxygen Concentration in Heavily Doped Silicon Substrates by Secondary Ion Mass Spectrometry
Available format(s)
Hardcopy
Superseded date
16-11-2023
Superseded by
Language(s)
English
Published date
01-10-2018
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the determination of total oxygen concentration in the bulk of single crystal silicon substrates using SIMS.
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
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