SEMI MF1391:2007(R2023)
Current
Current
The latest, up-to-date edition.
Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
€141.67
Excluding VAT
This reference Test Method covers the determination of substitutional carbon concentration in single crystal silicon.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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