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SEMI MF1451 : 2007(R2021)

Current

Current

The latest, up-to-date edition.

Test Method for Measuring Sori on Silicon Wafers by Automated Noncontact Scanning

Available format(s)

Hardcopy

Language(s)

English

Published date

01-04-2021

Sori can significantly affect the yield of semiconductor device processing.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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€139.95
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