SEMI MF1527:2012(R2023)
Current
Current
The latest, up-to-date edition.
Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers.
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