Name: SEMI MF1527:2012(R2023)
Brand: SEMI
Price: 158.61 EUR

Guide for Application of Certified Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon

Available format(s)

Hardcopy

Language(s)

English

Published date

01-10-2023

Publisher

Semiconductor Equipment & Materials Institute

This Guide covers the application of certified reference materials (CRMs) for resistivity measurements on silicon wafers.

DocumentType	Standard
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current
Supersedes	SEMI MF1527:2012(R2018)

SEMI MF1392:2007	TEST METHOD FOR DETERMINING NET CARRIER DENSITY PROFILES IN SILICON WAFERS BY CAPACITANCE-VOLTAGE MEASUREMENTS WITH A MERCURY PROBE
SEMI MF672 : 2007	TEST METHOD FOR MEASURING RESISTIVITY PROFILES PERPENDICULAR TO THE SURFACE OF A SILICON WAFER USING A SPREADING RESISTANCE PROBE

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SEMI MF1527:2012(R2023)