SEMI MF1529 : 2010(R2015)
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR SHEET RESISTANCE UNIFORMITY EVALUATION BY IN-LINE FOUR-POINT PROBE WITH THE DUAL-CONFIGURATION PROCEDURE
Published date
12-01-2013
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Specifies the direct measurement of the sheet resistance and its variation for all but the periphery (amounting to three probe separations) for circular conducting layers pertinent to silicon semiconductor technology.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2004)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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