SEMI MF1535:2015(R2021)
Current
Current
The latest, up-to-date edition.
Test Method for Carrier Recombination Lifetime in Electronic-Grade Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.If the free carrier density of an electronic-grade semiconductor is not too high, the carrier recombination lifetime is controlled by impurity centers that have energies located in the forbidden energy gap.
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
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