SEMI MF1569:2007(2023)
Current
Current
The latest, up-to-date edition.
Guide for Generation of Consensus Reference Materials for Semiconductor Technology
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Guide covers the steps to be taken to generate a set of ConRefs for a specific property or family of related properties required in semiconductor technology.
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