SEMI MF1811:2016(R2021)
Current
Current
The latest, up-to-date edition.
Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.There is some confusion in the roughness-measurement community concerning the use of estimators and the calculation of power spectral densities (PSDs) from discrete data sets.
| DocumentType |
Guide
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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