SEMI MF1811:2016(R2021)
Current
Current
The latest, up-to-date edition.
Guide for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data
Available format(s)
Hardcopy
Language(s)
English
Published date
01-11-2021
There is some confusion in the roughness-measurement community concerning the use of estimators and the calculation of power spectral densities (PSDs) from discrete data sets.
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