SEMI MF2139 : 2003(R2016)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR MEASURING NITROGEN CONCENTRATION IN SILICON SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY
Superseded date
07-12-2021
Superseded by
Published date
12-01-2013
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Specifies the determination of total nitrogen concentration in the bulk of single crystal substrates using secondary ion mass spectrometry (SIMS).
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI PV25 : 2017 | TEST METHOD FOR SIMULTANEOUSLY MEASURING OXYGEN, CARBON, BORON AND PHOSPHORUS IN SOLAR SILICON WAFERS AND FEEDSTOCK BY SECONDARY ION MASS SPECTROMETRY |
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