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SEMI MF2139 : 2003(R2016)

SEMI MF2139 : 2003(R2016)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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TEST METHOD FOR MEASURING NITROGEN CONCENTRATION IN SILICON SUBSTRATES BY SECONDARY ION MASS SPECTROMETRY

Superseded date

07-12-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies the determination of total nitrogen concentration in the bulk of single crystal substrates using secondary ion mass spectrometry (SIMS).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI PV25 : 2017 TEST METHOD FOR SIMULTANEOUSLY MEASURING OXYGEN, CARBON, BORON AND PHOSPHORUS IN SOLAR SILICON WAFERS AND FEEDSTOCK BY SECONDARY ION MASS SPECTROMETRY

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