SEMI MF26 : 2014E
Current
Current
The latest, up-to-date edition.
TEST METHOD FOR DETERMINING THE ORIENTATION OF A SEMICONDUCTIVE SINGLE CRYSTAL
Published date
12-01-2013
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Gives techniques for determining the crystallographic orientation of a surface which is roughly parallel to a low-index atomic plane in single crystals used primarily for semiconductor devices.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005) E = This standard was editorially modified in November 2017 to correct editorial errors. (01/2018)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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