SEMI MF397:2012
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Test Method for Resistivity of Silicon Bars Using a Two-Point Probe
Hardcopy
16-11-2023
English
01-08-2012
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the measurement of the resistivity of single-crystal bars having cross sections that are uniform in area and square, rectangular or round in shape, and having resistivity between 0.0009 Ω·cm and 3000 Ω·cm.
| DocumentType |
Test Method
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| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
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