SEMI MF397:2012(R2023)
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The latest, up-to-date edition.
Test Method for Resistivity of Silicon Bars Using a Two-Point Probe
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Test Method covers the measurement of the resistivity of single-crystal bars having cross sections that are uniform in area and square, rectangular or round in shape, and having resistivity between 0.0009 Ω·cm and 3000 Ω·cm.
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