SEMI MF399 : 2000A
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
TEST METHOD FOR THICKNESS HETEROEPITAXIAL OR POLYSILICON LAYERS
Withdrawn date
01-07-2010
Published date
12-01-2013
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| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI M41 : 2015 | SPECIFICATION OF SILICON-ON-INSULATOR (SOI) FOR POWER DEVICE/ICS |
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