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SEMI MF671:2012(R2018)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials

Available format(s)

Hardcopy

Superseded date

17-11-2023

Superseded by

SEMI MF671:2012(R2023)

Language(s)

English

Published date

01-01-2018

€152.54
Excluding VAT

This Test Method covers techniques for determination of the length of the flatted portion of a wafer periphery.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

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