SEMI MF671:2012(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
Available format(s)
Hardcopy
Language(s)
English
Published date
01-01-2018
Superseded date
17-11-2023
Superseded by
€141.67
Excluding VAT
This Test Method covers techniques for determination of the length of the flatted portion of a wafer periphery.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
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