SEMI MF671:2012(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
Available format(s)
Hardcopy
Superseded date
17-11-2023
Superseded by
Language(s)
English
Published date
01-01-2018
This Test Method covers techniques for determination of the length of the flatted portion of a wafer periphery.
DocumentType |
Test Method
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Superseded
|
SupersededBy | |
Supersedes |
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