![header thumbnail](/images/publishers\semi_cover.gif)
SEMI MF671:2012(R2023)
Current
Current
The latest, up-to-date edition.
![header thumbnail](/images/publishers\semi_cover.gif)
Test Method for Measuring Flat Length on Wafers of Silicon and Other Electronic Materials
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
This Test Method covers techniques for determination of the length of the flatted portion of a wafer periphery.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.