SEMI MF674 : 2016
Current
Current
The latest, up-to-date edition.
PRACTICE FOR PREPARING SILICON FOR SPREADING RESISTANCE MEASUREMENTS
Published date
12-01-2013
Contains the surface preparation of silicon samples using diamond polishing prior to measurement of resistivity variations by the spreading resistance technique.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.