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SEMI MF728 : 2006(R2017)

SEMI MF728 : 2006(R2017)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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PRACTICE FOR PREPARING AN OPTICAL MICROSCOPE FOR DIMENSIONAL MEASUREMENTS

Superseded date

04-07-2022

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides an image with steep edge gradients by setting the ratio of condenser numerical aperture to objective numerical aperture equal to approximately two thirds.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI PV29 : 2012 SPECIFICATION FOR FRONT SURFACE MARKING OF PV SILICON WAFERS WITH TWO-DIMENSIONAL MATRIX SYMBOLS
SEMI PV32 : 2012(R2019) SPECIFICATION FOR MARKING OF PV SILICON BRICK FACE AND PV WAFER EDGE

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