SEMI MF728 : 2006(R2017)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PRACTICE FOR PREPARING AN OPTICAL MICROSCOPE FOR DIMENSIONAL MEASUREMENTS
Superseded date
04-07-2022
Superseded by
Published date
12-01-2013
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Provides an image with steep edge gradients by setting the ratio of condenser numerical aperture to objective numerical aperture equal to approximately two thirds.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI PV29 : 2012 | SPECIFICATION FOR FRONT SURFACE MARKING OF PV SILICON WAFERS WITH TWO-DIMENSIONAL MATRIX SYMBOLS |
| SEMI PV32 : 2012(R2019) | SPECIFICATION FOR MARKING OF PV SILICON BRICK FACE AND PV WAFER EDGE |
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