SEMI MF728:2022
Current
Current
The latest, up-to-date edition.
Practice for Preparing an Optical Microscope for Dimensional Measurements
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2022
Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself.
DocumentType |
Standard
|
Pages |
0
|
PublisherName |
Semiconductor Equipment & Materials Institute
|
Status |
Current
|
Supersedes |
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