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SEMI MF728:2022

Current

Current

The latest, up-to-date edition.

Practice for Preparing an Optical Microscope for Dimensional Measurements

Available format(s)

Hardcopy

Language(s)

English

Published date

01-06-2022

€134.60
Excluding VAT

Dimensional measurements made with an optical microscope are made on the optical image of the specimen and not directly on the specimen itself.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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