SEMI MF84:2012(R2018)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe
Available format(s)
Hardcopy
Language(s)
English
Published date
01-07-2018
Superseded date
16-11-2023
Superseded by
€141.67
Excluding VAT
This Test Method covers the measurement of the resistivity of silicon wafers with an in-line four-point probe.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy | |
| Supersedes |
| SEMI MF1527 : 2007 | GUIDE FOR APPLICATION OF CERTIFIED REFERENCE MATERIALS AND REFERENCE WAFERS FOR CALIBRATION AND CONTROL OF INSTRUMENTS FOR MEASURING RESISTIVITY OF SILICON |
| SEMI MF2074 : 2012 (R2018) | GUIDE FOR MEASURING DIAMETER OF SILICON AND OTHER SEMICONDUCTOR WAFERS |
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