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SEMI MF84:2012(R2018)

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe

Available format(s)

Hardcopy

Superseded date

16-11-2023

Superseded by

SEMI MF84:2012(R2023)

Language(s)

English

Published date

01-07-2018

€152.54
Excluding VAT

This Test Method covers the measurement of the resistivity of silicon wafers with an in-line four-point probe.

DocumentType
Test Method
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy
Supersedes

SEMI MF1527 : 2007 GUIDE FOR APPLICATION OF CERTIFIED REFERENCE MATERIALS AND REFERENCE WAFERS FOR CALIBRATION AND CONTROL OF INSTRUMENTS FOR MEASURING RESISTIVITY OF SILICON

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