SEMI MF84:2012(R2023)
Current
Current
The latest, up-to-date edition.
Test Method for Measuring Resistivity of Silicon Wafers With an In-Line Four-Point Probe
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
Important note : Users cannot be edited or removed once added to your Multi user PDF.This Test Method covers the measurement of the resistivity of silicon wafers with an in-line four-point probe.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI MF525:2012(R2023) | Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe |
| SEMI MF525:2012(R2018) | Test Method for Measuring Resistivity of Silicon Wafers Using a Spreading Resistance Probe |
| SEMI MF1527 : 2007 | GUIDE FOR APPLICATION OF CERTIFIED REFERENCE MATERIALS AND REFERENCE WAFERS FOR CALIBRATION AND CONTROL OF INSTRUMENTS FOR MEASURING RESISTIVITY OF SILICON |
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