SEMI MS10 : 2012(R2018)
Current
Current
The latest, up-to-date edition.
TEST METHOD TO MEASURE FLUID PERMEATION THROUGH MEMS PACKAGING MATERIALS
Published date
12-01-2013
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Gives an overview of design considerations and hermetic packaging with particular emphasis on the evaluation of permeation of MEMS hermetic packages having internal cavity volumes that are very small compared to conventional packages.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2012)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI MS3 : 2015 | TERMINOLOGY FOR MEMS TECHNOLOGY |
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