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SEMI MS10 : 2012(R2018)
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The latest, up-to-date edition.
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TEST METHOD TO MEASURE FLUID PERMEATION THROUGH MEMS PACKAGING MATERIALS
Published date
12-01-2013
Gives an overview of design considerations and hermetic packaging with particular emphasis on the evaluation of permeation of MEMS hermetic packages having internal cavity volumes that are very small compared to conventional packages.
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