SEMI MS8 : 2009(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
GUIDE TO EVALUATING HERMETICITY OF MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGES
Superseded date
04-07-2022
Superseded by
Published date
12-01-2013
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Gives an overview of hermetic packaging with emphasis on the evaluation of hermeticity of the smaller internal volumes typical of MEMS.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI MS9 : 2011 | SPECIFICATION FOR HIGH DENSITY PERMANENT CONNECTIONS BETWEEN MICROFLUIDIC DEVICES |
| SEMI MS3 : 2015 | TERMINOLOGY FOR MEMS TECHNOLOGY |
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