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SEMI MS8 : 2009(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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GUIDE TO EVALUATING HERMETICITY OF MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGES
Superseded date
04-07-2022
Published date
12-01-2013
Gives an overview of hermetic packaging with emphasis on the evaluation of hermeticity of the smaller internal volumes typical of MEMS.
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