SEMI MS9 : 2011
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR HIGH DENSITY PERMANENT CONNECTIONS BETWEEN MICROFLUIDIC DEVICES
Published date
12-01-2013
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Gives specification for interconnection dimensions and performance requirements for permanent microfluidic interfaces. It also gives guidance for interface design.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI MS8 : 2009(R2015) | GUIDE TO EVALUATING HERMETICITY OF MICROELECTROMECHANICAL SYSTEMS (MEMS) PACKAGES |
| SEMI MS7 : 2008 | SPECIFICATION FOR MICROFLUIDIC INTERFACES TO ELECTRONIC DEVICE PACKAGES |
| SEMI F1 : 2012 | SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS |
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