SEMI P23 : 2000(R2007)
Current
Current
The latest, up-to-date edition.
GUIDELINE FOR PROGRAMMED DEFECT MASKS AND BENCHMARK PROCEDURES FOR SENSITIVITY ANALYSIS OF MASK DEFECT INSPECTION SYSTEMS
Published date
12-01-2013
Describes a test mask to be used for evaluation of the sensitivity of Mask Defect Inspection Systems. Also describes the content and methods for use of test masks used in the evaluation of mask defect inspection systems.
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