SEMI P41 : 2004E
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR MASK DEFECT DATA HANDLING WITH XML, BETWEEN DEFECT INSPECTION TOOLS, REPAIR TOOLS, AND REVIEW TOOLS
Published date
12-01-2013
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Describes the data hierarchy, the tag name, and contents of an XML file, which are transmitted.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2004) E = Editorially modified to correct editorial errors. (03/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI P46 : 2011 | SPECIFICATION FOR CRITICAL DIMENSION (CD) MEASUREMENT INFORMATION DATA ON PHOTOMASK BY XML |
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