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SEMI P41 : 2004E

SEMI P41 : 2004E

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR MASK DEFECT DATA HANDLING WITH XML, BETWEEN DEFECT INSPECTION TOOLS, REPAIR TOOLS, AND REVIEW TOOLS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the data hierarchy, the tag name, and contents of an XML file, which are transmitted.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (02/2004) E = Editorially modified to correct editorial errors. (03/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI P46 : 2011 SPECIFICATION FOR CRITICAL DIMENSION (CD) MEASUREMENT INFORMATION DATA ON PHOTOMASK BY XML

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