SEMI P45 : 2011
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR JOB DECK DATA FORMAT FOR MASK TOOLS
Superseded date
07-06-2021
Superseded by
Published date
12-01-2013
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Describes the common job deck data format specifications for mask tools, namely "MALY".
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI P39 : 2016 | SPECIFICATION FOR OASIS - OPEN ARTWORK SYSTEM INTERCHANGE STANDARD |
| SEMI P44 : MAR 2016 | SPECIFICATION FOR OPEN ARTWORK SYSTEM INTERCHANGE STANDARD (OASIS [R]) SPECIFIC TO MASK TOOLS |
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