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SEMI P45 : 2011

SEMI P45 : 2011

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR JOB DECK DATA FORMAT FOR MASK TOOLS

Superseded date

07-06-2021

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes the common job deck data format specifications for mask tools, namely "MALY".

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (03/2006)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI P39 : 2016 SPECIFICATION FOR OASIS - OPEN ARTWORK SYSTEM INTERCHANGE STANDARD
SEMI P44 : MAR 2016 SPECIFICATION FOR OPEN ARTWORK SYSTEM INTERCHANGE STANDARD (OASIS [R]) SPECIFIC TO MASK TOOLS

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