SEMI PR10 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PROPOSED SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
Superseded date
01-03-2006
Superseded by
Published date
12-01-2013
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Provides public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing equipment installations.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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