SEMI PR10 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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PROPOSED SPECIFICATION FOR RF AIR INTERFACE BETWEEN RFID TAGS IN CARRIERS AND RFID READERS IN SEMICONDUCTOR PRODUCTION AND MATERIAL HANDLING EQUIPMENT
Superseded date
01-03-2006
Published date
12-01-2013
Provides public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing equipment installations.
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