SEMI PR11 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TERMINOLOGY FOR MEMS TECHNOLOGY
Superseded date
01-03-2007
Superseded by
Published date
12-01-2013
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Describes terms describing generic attributes of MEMS devices and of materials and processes used in their manufacture.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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