SEMI PR11 : 2005
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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TERMINOLOGY FOR MEMS TECHNOLOGY
Superseded date
01-03-2007
Published date
12-01-2013
Describes terms describing generic attributes of MEMS devices and of materials and processes used in their manufacture.
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