SEMI PR3 : 99E
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
PROPOSED SPECIFICATION FOR SURFACE MOUNT INTERFACE OF GAS DISTRIBUTION COMPONENTS
01-03-2004
12-01-2013
It establishes the properties and physical dimensions which define the interface for all surface mount gas distribution components. It applies to all types of surface mount, gas distribution components used within semiconductor processing equipment (i.e. valves, pressure regulators, pressure transducers, filters, purifiers, and mass flow controllers). It applies to components which control flow of <= 50 slm nitrogen equivalent at 308 kPa (44.7 psia). It also only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.
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