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SEMI PV35 : 2015

SEMI PV35 : 2015

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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SPECIFICATION FOR HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM

Superseded date

01-06-2017

Published date

24-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a specification for communication between adjacent equipment in material flow (hereinafter referred to as horizontal communication [HC]) to be used for photovoltaic fabrication system or similar ones (equipment here includes process equipment, metrology equipment, transport equipment and clustered one of those, etc.).

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2013) Includes SEMI PV35.1. (02/2014)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI PV55 : 2015 DATA DEFINITION SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM

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