SEMI PV41 : 2012
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR IN-LINE, NONCONTACT MEASUREMENT OF THICKNESS AND THICKNESS VARIATION OF SILICON WAFERS FOR PV APPLICATIONS USING CAPACITIVE PROBES
Superseded date
04-05-2019
Superseded by
Published date
12-01-2013
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Specifies a noncontact, high throughput in-line method for measuring wafer thickness and its total variation using capacitive probes.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (10/2012)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
| SEMI PV70 : 2016 | TEST METHOD FOR IN-LINE MEASUREMENT OF SAW MARKS ON PHOTOVOLTAIC (PV) SILICON WAFERS BY LASER TRIANGULATION SENSORS |
| SEMI PV46 : 2013 | TEST METHOD FOR IN-LINE MEASUREMENT OF LATERAL DIMENSIONAL CHARACTERISTICS OF SQUARE AND PSEUDO-SQUARE PV SILICON WAFERS |
| SEMI PV71 : 2016 | TEST METHOD FOR IN-LINE, NONCONTACT MEASUREMENT OF THICKNESS AND THICKNESS VARIATION OF SILICON WAFERS FOR PHOTOVOLTAIC (PV) APPLICATIONS USING LASER TRIANGULATION SENSORS |
| SEMI PV22 : 2017 | SPECIFICATION FOR SILICON WAFERS FOR USE IN PHOTOVOLTAIC SOLAR CELLS |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI E89 : 2007(R2013) | GUIDE FOR MEASUREMENT SYSTEM ANALYSIS (MSA) |
| SEMI PV22 : 2017 | SPECIFICATION FOR SILICON WAFERS FOR USE IN PHOTOVOLTAIC SOLAR CELLS |
| SEMI MF1569 : 2007 | GUIDE FOR GENERATION OF CONSENSUS REFERENCE MATERIALS FOR SEMICONDUCTOR TECHNOLOGY |
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