SEMI PV41 : 2012(R2019)
Current
Current
The latest, up-to-date edition.
Test Method for In-Line, Noncontact Measurement of Thickness and Thickness Variation of Silicon Wafers for PV Applications Using Capacitive Probes
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2019
Important note : Users cannot be edited or removed once added to your Multi user PDF.Wafer thickness and its variation across a wafer are important parameters for solar cell manufacturing. Excessive thickness variations within a lot from wafer to wafer or within a wafer may negatively impact process yield and solar cell efficiency.
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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