SEMI PV42 : 2014
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
TEST METHOD FOR IN-LINE MEASUREMENT OF WAVINESS OF PV SILICON WAFERS BY A LIGHT SECTIONING TECHNIQUE USING MULTIPLE LINE SEGMENTS
Superseded date
05-10-2020
Superseded by
Published date
07-02-2013
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Describes the maximum peak-to-valley of waviness of multi or single crystal Si wafers that typically runs across the entire wafer surface and along the wire direction.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2013)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI M59 : 2014 | TERMINOLOGY FOR SILICON TECHNOLOGY |
| SEMI E89 : 2007(R2013) | GUIDE FOR MEASUREMENT SYSTEM ANALYSIS (MSA) |
| SEMI MF1569 : 2007 | GUIDE FOR GENERATION OF CONSENSUS REFERENCE MATERIALS FOR SEMICONDUCTOR TECHNOLOGY |
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