SEMI PV48-0613 (Reapproved 0419)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR ORIENTATION FIDUCIAL MARKS FOR PV SILICON WAFERS
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2019
€125.00
Excluding VAT
Dimensional metrics as described in several SEMI Test Methods do not define wafer physical orientation during measurement.
| DocumentType |
Revision
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| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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