Name: SEMI PV48 : 2013
Brand: SEMI
Price: 139.95 EUR
Availability: InStock

SPECIFICATION FOR ORIENTATION FIDUCIAL MARKS FOR PV SILICON WAFERS

Available format(s)

Hardcopy

Superseded date

01-04-2019

Language(s)

English

Published date

01-06-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies how current marks may be used as orientation fiducial marks.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (06/2013)
DocumentType	Standard
Pages	0
PublisherName	Semiconductor Equipment & Materials Institute
Status	Superseded
SupersededBy	SEMI PV48-0613 (Reapproved 0419)

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SEMI PV48 : 2013