SEMI PV48 : 2013
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR ORIENTATION FIDUCIAL MARKS FOR PV SILICON WAFERS
Available format(s)
Hardcopy
Language(s)
English
Published date
01-06-2013
Superseded date
01-04-2019
Superseded by
€125.00
Excluding VAT
Specifies how current marks may be used as orientation fiducial marks.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (06/2013)
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI PV29 : 2012 | SPECIFICATION FOR FRONT SURFACE MARKING OF PV SILICON WAFERS WITH TWO-DIMENSIONAL MATRIX SYMBOLS |
| SEMI PV32 : 2012(R2019) | SPECIFICATION FOR MARKING OF PV SILICON BRICK FACE AND PV WAFER EDGE |
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