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  • SEMI S11 : 1996

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    ENVIRONMENTAL SAFETY, AND HEALTH GUIDELINES FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT MINIENVIRONMENTS

    Available format(s): 

    Withdrawn date:  01-11-2006

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Gives minimum performance-based health, environmental, and safety considerations for minienvironments used in semiconductor manufacturing. Applies to minienvironments used in assembly, testing, metrology and manufacturing of semiconductor products and is intended to supplement SEMI S2.

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    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Withdrawn

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI E106 : 2004 OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
    01/121101 DC : DRAFT MAR 2001 BS EN ISO 14644-7 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 7: SEPARATIVE ENCLOSURES (CLEAN AIR HOODS, GLOVEBOXES, ISOLATORS, MINI-ENVIRONMENTS)
    DIN EN ISO 14644-7:2005-01 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) (ISO 14644-7:2004); German version EN ISO 14644-7:2004

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
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